Ultra-pure water systems meeting SEMI F63 and leading fab quality requirements.
Semiconductor manufacturing demands parts-per-billion purity. Puraxtek supplies ultra-pure water systems with double-pass RO, EDI and polishing, engineered for wafer cleaning and other critical processes, with full inline analytics.
| Resistivity | 18.2 MΩ·cm @ 25 °C |
|---|---|
| TOC | ≤ 5 ppb; DO ≤ 5 ppb (options) |
| Particles | ≤ 1 /mL at ≥ 0.05 µm (per spec) |
| Metals | ppt-level per SEMI F63 |
| Piping | PFA / PVDF / electropolished SS |
| Capacity | 1 – 200 m³/h |
18.2 MΩ·cm ultra-pure water for semiconductor, pharmaceutical and power applications.
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Learn moreSend us your water analysis and target quality — our engineers reply within 24 hours with a costed proposal.